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Download Nanopositioning Newsletter #37
Ultra-High-Load Motorized Actuator
Ultra-Compact Ultrasonic Drive, Piezo-Motor Stage
PCI-Bus Piezo Nanopositioning Controller a World First
Nanopositioning Z-Stage with Hybrid Piezo/DC-Motor Drive Features 2 Nanometer Linear Encoder
Lever-Amplified Piezoelectric Nanopositioners Boast Precision Flexure Guides
Semi Award for NEXLINE® Nano Drive


Download the Precision
Miniature Linear Slides Catalog



500 page PI Catalog

Get the hardbound, 500
    page PI Catalog
Linear Slides: Precision Piezo & Motorized Micropositioning and Nanopositioning Systems for Motion Control

Miniature Slides w/
Servo / Stepper Motors


Miniature Slides
Lead-/Ball- Screw Drive
Travel: to 25 mm or 360°
Linear Slides w/
Servo / Stepper Motors


Travel: to 306 mm (12")
Forces to 200 N
Resolution to 50 nm
Hybrid Ultra-Precision Linear Slide

Forces to 100 kN
Sub-nm Resolution
Fast Response
Voice Coil-Driven Linear Slide

Scanning Freq:10s of Hz
Velocity to 270 mm/s
Travel: 20 mm / 6 mm
Vertical
Linear Slide

Active Servo Motor
High Speed
Travel: 1/2" (12.5 mm)

Small PiezoMotor Linear Slides

Fast: to 800 mm/sec
Acceleration to 20 g
Self-Locking, Non-
    Magnetic, Vacuum
    Compatible
XY Piezo Motor Linear Slide

0.1 µm Resolution
Travel: to 25x25 mm
Low Profile, Compact
    Dimensions
Piezo Flexure Linear Nanopositioning Slides

Sub-nm Precision
Sub-Millisecond
    Response
Fast Scanning
Linear
Actuators


Travel: 10 mm-50 mm
Forces to 600 N
Resolution to Sub-nm
Servo
Controllers


Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount
 

PI makes the highest precision linear slides for micro & nanopositioning. In addition to classical motorized linear slides, PI also provides a vast selection of piezoelectric flexure slides for ultra precision motion control applications, and linear motor positioning slides for scientific and industrial applications.

Read More ...

Precision Miniature Linear Slide Catalog
Hexapod 6-Axis Stage Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control


Linear Slides

Product Image - Fast Miniature Linear Slide with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Slide with Integrated Optical Linear Encoder


  • Travel 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Position Resolution Micro-Linear Slides

M-110 High-Resolution Micro-Linear Slides


  • 0.05 Micro Meters Minimum Incremental Motion
  • 5, 15 and 25 mm Travel s
  • Velocity to 1.5 mm/sec.
  • Closed - Loop DC Motors and Stepper Motors
  • Integrated Hall - Effect Limit and Reference Switches
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Product Image - High-Position Resolution Micro-Linear Slides with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Linear Slides with Ballscrew Drive


  • 5 to 25 mm Travel s
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Micro Piezomotor Linear Drive

P-652 PILine® Micro Piezomotor Linear Drive


  • Cost-Effective, High-Volume-Production Drive
  • Piezo Micro-Motor: 9.0x6.5x2.4 mmł
  • Travel 3.2 mm
  • Velocity to 80 mm/s
  • Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Linear Slides with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Linear Slides with Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with High-Speed Linear Motor Drive
  • 20 mm Travel
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Position Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Linear Slides

M-663 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Position Resolution to 0.1 Micro Meters
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image -  PILine Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Motion Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-665
PILine® Low-Profile Translation Stages

M-665 PILine® Low-Profile Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • 50 mm Travel
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 Micro Meters Linear Encoder (Direct-Motion Metrology)
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
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Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Low-Profile Translation Stagewith Closed-Loop Ultrasonic Piezo Linear Motors

M-682 Compact Closed-Loop Linear Slide with High-Force Piezo Linear Motor


  • Integration of the Powerful PILine® RodDrive
  • Low Profile, Compact Dimensions
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
  • Direct Motion Metrology Linear Encoder, 0.1 µm Resolution
  • Non-Magnetic and Vacuum-Compatible Versions Available

Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s
  • 25x25 mm Travel s
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150x150 mm Footprint
  • Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image -  Series of Miniature Linear Slide

M-311 – M-318 Miniature Linear Slide


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
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Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Translation Stage with Crossed Roller Bearings

M-126 Translation Stage with Crossed Roller Bearings


  • To 25 mm Travel
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micro Meters Position Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Position Resolution Translation Stage with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Linear Slide with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel s from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micro Meters
  • Position Resolution to 0.017 Micro Meters
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Product Image - High-Precision Linear Slides with Crossed Roller Bearings

M-400 Series High-Precision Linear Slides with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Linear Slide


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile Translation Stage with Ballscrew Drives

M-505 Low-Profile Linear Slides with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile, High-Load Linear Slides with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Slides with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Hybrid Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Position Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
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Voice Coil Scanning Stage
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micro Meters Linear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | Specs / Drawings | Ordering Info | PDF