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Download Nanopositioning Newsletter #37
Ultra-High-Load Motorized Actuator
Ultra-Compact Ultrasonic Drive, Piezo-Motor Stage
PCI-Bus Piezo Nanopositioning Controller a World First
Nanopositioning Z-Stage with Hybrid Piezo/DC-Motor Drive Features 2 Nanometer Linear Encoder
Lever-Amplified Piezoelectric Nanopositioners Boast Precision Flexure Guides
Semi Award for NEXLINE® Nano Drive


Download the Precision
Miniature Linear Slides Catalog



500 page PI Catalog

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    page PI Catalog
Linear Slides: Precision Piezo & Motorized Micropositioning and Nanopositioning Systems for Motion Control

Miniature Slides w/
Servo / Stepper Motors


Miniature Slides
Lead-/Ball- Screw Drive
Travel: to 25 mm or 360°
Linear Slides w/
Servo / Stepper Motors


Travel: to 306 mm (12")
Forces to 200 N
Resolution to 50 nm
Hybrid Ultra-Precision Linear Slide

Forces to 100 kN
Sub-nm Resolution
Fast Response
Voice Coil-Driven Linear Slide

Scanning Freq:10s of Hz
Velocity to 270 mm/s
Travel: 20 mm / 6 mm
Vertical
Linear Slide

Active Servo Motor
High Speed
Travel: 1/2" (12.5 mm)

Small PiezoMotor Linear Slides

Fast: to 800 mm/sec
Acceleration to 20 g
Self-Locking, Non-
    Magnetic, Vacuum
    Compatible
XY Piezo Motor Linear Slide

0.1 µm Resolution
Travel: to 25x25 mm
Low Profile, Compact
    Dimensions
Piezo Flexure Linear Nanopositioning Slides

Sub-nm Precision
Sub-Millisecond
    Response
Fast Scanning
Linear
Actuators


Travel: 10 mm-50 mm
Forces to 600 N
Resolution to Sub-nm
Servo
Controllers


Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount
 

PI makes the highest precision linear slides for micro & nanopositioning. In addition to classical motorized linear slides, PI also provides a vast selection of piezoelectric flexure slides for ultra precision motion control applications, and linear motor positioning slides for scientific and industrial applications.

Read More ...

Precision Miniature Linear Slide Catalog
Hexapod 6-Axis Stage Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control


Linear Slides

Product Image - Fast Miniature Linear Slide with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Slide with Integrated Optical Linear Encoder


  • Travel 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | | | PDF
Product Image - High-Position Resolution Micro-Linear Slides

M-110 High-Resolution Micro-Linear Slides


  • 0.05 Micro Meters Minimum Incremental Motion
  • 5, 15 and 25 mm Travel s
  • Velocity to 1.5 mm/sec.
  • Closed - Loop DC Motors and Stepper Motors
  • Integrated Hall - Effect Limit and Reference Switches
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - High-Position Resolution Micro-Linear Slides with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Linear Slides with Ballscrew Drive


  • 5 to 25 mm Travel s
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Product Description | | | PDF
Product Image - PILine Micro Piezomotor Linear Drive

P-652 PILine® Micro Piezomotor Linear Drive


  • Cost-Effective, High-Volume-Production Drive
  • Piezo Micro-Motor: 9.0x6.5x2.4 mmł
  • Travel 3.2 mm
  • Velocity to 80 mm/s
  • Self-Locking
Product Description | | | PDF
Product Image - PILine Miniature Linear Slides with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Linear Slides with Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with High-Speed Linear Motor Drive
  • 20 mm Travel
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Position Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | | | PDF
Product Image - PILine Miniature Linear Slides

M-663 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Position Resolution to 0.1 Micro Meters
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | | | PDF
Product Image -  PILine Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Motion Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | | | PDF
Product Image - M-665
PILine® Low-Profile Translation Stages

M-665 PILine® Low-Profile Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • 50 mm Travel
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 Micro Meters Linear Encoder (Direct-Motion Metrology)
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
Back to Top
Parametric Search      Product Description | | | PDF

Product Image - PILine Low-Profile Translation Stagewith Closed-Loop Ultrasonic Piezo Linear Motors

M-682 Compact Closed-Loop Linear Slide with High-Force Piezo Linear Motor


  • Integration of the Powerful PILine® RodDrive
  • Low Profile, Compact Dimensions
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
  • Direct Motion Metrology Linear Encoder, 0.1 µm Resolution
  • Non-Magnetic and Vacuum-Compatible Versions Available

Product Description | | | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s
  • 25x25 mm Travel s
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150x150 mm Footprint
  • Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages

Product Description | | | PDF
Product Image -  Series of Miniature Linear Slide

M-311 – M-318 Miniature Linear Slide


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | | | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | | | PDF
Product Image - Translation Stage with Crossed Roller Bearings

M-126 Translation Stage with Crossed Roller Bearings


  • To 25 mm Travel
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micro Meters Position Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | | | PDF
Product Image - High-Position Resolution Translation Stage with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Linear Slide with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel s from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micro Meters
  • Position Resolution to 0.017 Micro Meters
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - High-Precision Linear Slides with Crossed Roller Bearings

M-400 Series High-Precision Linear Slides with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | | | PDF
Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Linear Slide


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | | | PDF
Product Image - Low-Profile Translation Stage with Ballscrew Drives

M-505 Low-Profile Linear Slides with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - Low-Profile, High-Load Linear Slides with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Slides with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | | | PDF
Product Image - Hybrid Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Position Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
Back to Top
Parametric Search      Product Description | | | PDF
Voice Coil Scanning Stage
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micro Meters Linear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | | | PDF


Vertical Translation Stages

Product Image - IHera Vertical Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Slides with Direct Motion Metrology


  • Z-Axis Travel to 400 Micro Meters
  • Low Profile
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | | | PDF
Product Image - Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • Travel 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

Back to Top
Parametric Search      Product Description | | | PDF
Product Image -  High-Load Vertical Micropositioning Stage

M-451 High-Load Vertical Micropositioning Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Product Description | | | PDF
Product Image -  M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Position Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Product Description | | | PDF


   Single Axis Piezo Nanopositioning Slides

Product Image - Miniature Piezo Nanopositioning/Scanning Slide with Direct Motion Metrology

P-780 Miniature Piezo Nanopositioning/Scanning Slide with Direct Metrology


  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 Micro Meters Travel
  • Direct Motion Metrology with LVDT Sensor
  • Position Resolution <5 Nanometer
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives


Back to Top
Product Image - High-Load Piezo-Driven Nanopositioning Slides with Direct Motion Metrology

P-750 High-Load Piezo-Driven Nanopositioning Slides with Direct Metrology


  • 10 kg Load Capacity
  • 1 Nanometer Lateral Guiding Precision
  • Position Resolution <1 Nanometer
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 Micro Meters Travel
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Frictionless Precision Flexure Guiding System

Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.1 – P-628.1 PIHera® Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology


  • Travel to 1800 Micro Meters
  • Compact Design
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772OL Ultra-Compact Open-Loop PZT Nanopositioning Stage


  • Small Flexure-Guided Linear Slide
  • 50 Picometer Resolution
  • 10 Micro Meters Travel
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • Closed-Loop Version Available

Back to Top
Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772 Ultra-Compact Piezo NanoAutomation® Slide with Direct Motion Metrology


  • Smallest Flexure-Guided Linear Slide with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Position Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-752 Piezo NanoAutomation® Slides with Direct Motion Metrology


  • Extreme Responsivness
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capaciance Feedback for Improved Linearity
  • 0.1 Nanometers Resolution
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-753 LISA Piezo NanoAutomation® Slides / Actuators with Direct Motion Metrology


  • Slide and Linear Actuator in one Package
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nanometers Position Resolution
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Extreme Responsivness, Very Compact
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available

Back to Top
   Z-Stage & Actuators

Product Image - Z/Tilt Piezoelectric Flexure Stage

P-287 Z/Tilt Piezoelectric Flexure Stage


  • Frictionless Precision Flexure Guiding System
  • Vertical Travel to 700 Micro Meters
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design



Product Image - Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator

P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator


  • Vertical Travel to 1000 Micro Meters
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design


Back to Top
Product Image - PiezoMove High-Precision Lever Amplified Z-Actuator with Flexure Guiding

P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding


  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Micro Meters
  • Position Resolution to 0.2 Nanometer
  • High Dynamics and Stiffness
  • Ceramic Encapsulated High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications


Back to Top
Product Image - Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Motion Metrology

P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology


  • Z-Axis Travel to 300 Micro Meters
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Position Resolution <10 Nanometer
  • PICMA®High-Performance Multilayer Piezo Drives


Product Image - IHera Vertical Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Slides with Direct Motion Metrology


  • Z-Axis Travel to 400 Micro Meters
  • Low Profile
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - M-714 Hybrid Piezo Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments

Back to Top

    Z-/Tip/Tilt Slides (with Aperture)

Product Image - Nanopositioning Stage With Aperture

P-732 High-Dynamics Vertical Nanopositioning/Scanning Stage


  • High Stiffness for High-Dynamics Operation
  • Up to 15 Micro Meters Vertical Travel
  • <1 Nanometer Resolution
  • Straightness of travel <10 microradian
  • Clear Aperture with 25 mm Diameter



Product Image - Compact Piezo Elevation Stage with Aperture

P-612 Compact Piezo Elevation Stage with Aperture


  • Small Footprint: 60x60 mm
  • For Cost-Sensitive Applications
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • Clear Aperture : 20x20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators

Back to Top
Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy

P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Fast Response
  • 100 Micro Meters Linear Travel
  • 80x80 mm Clear Aperture
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Combination with Long Travel Microscopy Stages

Back to Top
Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology

P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capaciance Feedback (Higher Performance)
  • 100 Micro Meters Linear Travel , 1 milliradian Tilt
  • 80x80 mm Clear Aperture
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging

Product Image - Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology

P-528 Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micro Meters / 4 milliradian
  • Clear Aperture 66x66 mm
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

     PIFOC® Objective Scanners

Product Image - PIFOC High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives

P-720 PIFOC® High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 Micro Meters
  • Straightness of Travel ≤13 microradian
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives


Back to Top
Product Image - PIFOC High-Speed Nanofocusing/Scanning Z-Drives with Direct Motion Metrology

P-721 PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Motion Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 Micro Meters, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment


Product Image - IFOC Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology

P-725 PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Capaciance Feedback
  • Travel to 460 Micro Meters, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment



    Multi-Axis Slides without Aperture

Product Image - Modular Piezo Flexure Guided Nanopositioning Slides

P-280 Modular Piezo Flexure Guided Nanopositioning Stages


  • Frictionless Precision Flexure Guiding System
  • Very Compact
  • Low Cost
  • Travel to 100 Micro Meters
  • XY and XYZ Combinations


Back to Top
Product Image - Compact Z and XZ Piezoelectric Nanopositioning Systems

P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems


  • Small Footprint: 44x44 mm
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models

Product Image - Compact X &  XY Piezoelectric Nanopositioning Systems

P-611.1 · P-611.2 Compact X & XY Piezoelectric Nanopositioning Systems


  • Small Footprint: 44x44 mm
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available

Product Image - Modular XY and XYZ Piezo Flexure Guided Nanopositioning Slides

P-281 Modular XY & XYZ Piezo Flexure Guided Nanopositioning Stages


  • Cost-Effective XZ (XY) & XYZ Positioning
  • Travel Ranges to 100x100x100 Micro Meters

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Product Image - PIHera Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.2 – P-628.2 PIHera® Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology


  • XY-Travel to 1800 Micro Meters
  • Compact Design
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - PicoCube High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM

P-363 PicoCube® High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM

&
  • Ultra-High-Performance Closed-Loop Piezo Stage for AFM/SPM
  • NanoManipulation Tool
  • Ultra-High-Precision Capacitive Feedback
  • 50 Picometers Resolution
  • 5x5x5 Micro Meters Travel
  • Very Small Package
  • Rugged Design


Product Image - NanoCube XYZ Piezo Nanopositioning Systems

P-611.3S · P-611.3O NanoCube® Piezo System XYZ Linear Slide


  • Travel : 100x100x100 Micro Meters
  • Compact Size: 44x44x44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers

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Product Image - Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology

P-587 Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800x800x200 Micro Meters Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel-Kinematic / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • ID-Chip for Auto Calibration Function
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives



    Multi-Axis Stage with Aperture

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