Linear Slide, Precision Motion Control, Motor Stage: Motorized / Piezoelectric Micropositioning and Nanopositioning Stage for Ultra Precision Motion Control Applications; Linear Slide, Linear Table, XY Slide , XY Table, XYZ-Stage, XYZ-slide

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	Download Nanopositioning Newsletter #37
	Ultra-High-Load Motorized Actuator
	Ultra-Compact Ultrasonic Drive, Piezo-Motor Stage
	PCI-Bus Piezo Nanopositioning Controller a World First
	Nanopositioning Z-Stage with Hybrid Piezo/DC-Motor Drive Features 2 Nanometer Linear Encoder
	Lever-Amplified Piezoelectric Nanopositioners Boast Precision Flexure Guides
	Semi Award for NEXLINE^® Nano Drive

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Linear Slides: Precision Piezo & Motorized Micropositioning and Nanopositioning Systems for Motion Control

Miniature Slides w/ Servo / Stepper Motors Miniature Slides Lead-/Ball- Screw Drive Travel: to 25 mm or 360°	Linear Slides w/ Servo / Stepper Motors Travel: to 306 mm (12") Forces to 200 N Resolution to 50 nm	Hybrid Ultra-Precision Linear Slide Forces to 100 kN Sub-nm Resolution Fast Response	Voice Coil-Driven Linear Slide Scanning Freq:10s of Hz Velocity to 270 mm/s Travel: 20 mm / 6 mm	Vertical Linear Slide Active Servo Motor High Speed Travel: 1/2" (12.5 mm)

Small PiezoMotor Linear Slides Fast: to 800 mm/sec Acceleration to 20 g Self-Locking, Non- Magnetic, Vacuum Compatible	XY Piezo Motor Linear Slide 0.1 µm Resolution Travel: to 25x25 mm Low Profile, Compact Dimensions	Piezo Flexure Linear Nanopositioning Slides Sub-nm Precision Sub-Millisecond Response Fast Scanning	Linear Actuators Travel: 10 mm-50 mm Forces to 600 N Resolution to Sub-nm	Servo Controllers Servo/Stepper/ Piezomotor Options 1-18 Channel Options PC-Card, OEM / Rack-mount


	PI makes the highest precision linear slides for micro & nanopositioning. In addition to classical motorized linear slides, PI also provides a vast selection of piezoelectric flexure slides for ultra precision motion control applications, and linear motor positioning slides for scientific and industrial applications.		Read More ... Precision Miniature Linear Slide Catalog Hexapod 6-Axis Stage Brochure Experience / Custom Systems Reasons for Choosing PI Test and Quality Control



Linear Slides


		M-122 Fast Miniature Linear Slide with Integrated Optical Linear Encoder Travel 25 mm 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability Min. Incremental Motion to 0.2 µm Max. Velocity 20 mm/s Cross-Roll Bearings Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-110 High-Resolution Micro-Linear Slides 0.05 Micro Meters Minimum Incremental Motion 5, 15 and 25 mm Travel s Velocity to 1.5 mm/sec. Closed - Loop DC Motors and Stepper Motors Integrated Hall - Effect Limit and Reference Switches
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		M-110.2 - M-112.2 High-Resolution Micro-Linear Slides with Ballscrew Drive 5 to 25 mm Travel s 5000 h MTBF Very Cost Effective 200 Nanometer Minimum Inc. Motion Hall - Effect Limit & Reference Switches Recirculating Ballscrew for Extended Lifetime
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		P-652 PILine^® Micro Piezomotor Linear Drive Cost-Effective, High-Volume-Production Drive Piezo Micro-Motor: 9.0x6.5x2.4 mm³ Travel 3.2 mm Velocity to 80 mm/s Self-Locking
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-661 - M-662 PILine^® Miniature Linear Slides with Ultrasonic Piezo Linear Motors Smallest Linear Slide with High-Speed Linear Motor Drive 20 mm Travel Velocity to 500 mm/s Acceleration to 20 g Position Resolution to 50 Nanometer Self-Locking XY-Combinations Available 20000 h MTBF Vacuum Versions to 10^-7 hPa
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-663 PILine^® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors Smallest Linear Slide with Closed-Loop Linear Motor Drive and Linear Encoder 20 mm Travel Velocity up to 500 mm/s Accelerations up to 20 g Position Resolution to 0.1 Micro Meters Integrated Direct-Metrology Linear Encoder AutoLock Feature XY Combinations Available 20,000 h MTBF Vacuum Versions Available
Product Description \| Specs / Drawings \| Ordering Info \| PDF




		M-664 PILine^® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors Travel 25 mm Max. Velocity 400 mm/s Ultra-Low Profile, 15 mm Direct Motion Metrology Linear Encoder with 0.1 µm Resolution High Guiding Accuracy with Crossed Roller Bearings Compact XY Combinations Piezo Linear Motor with 6 N Drive Force Self Locking at Rest
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		M-665 PILine® Low-Profile Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors 50 mm Travel Low-Profile, only 26.5 mm Velocity to 400 mm/s Acceleration to 20 g 0.1 Micro Meters Linear Encoder (Direct-Motion Metrology) AutoLock Feature XY Combinations Available 20,000 h MTBF Vacuum Versions to 10-⁸ hPa Available
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		M-682 Compact Closed-Loop Linear Slide with High-Force Piezo Linear Motor Integration of the Powerful PILine® RodDrive Low Profile, Compact Dimensions Max. Velocity 350 mm/s Up to 7 N Pushing Force Direct Motion Metrology Linear Encoder, 0.1 µm Resolution Non-Magnetic and Vacuum-Compatible Versions Available
Product Description \| Specs / Drawings \| Ordering Info \| PDF




		M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s 25x25 mm Travel s Integrated Linear Encoders with 0.1 µm Resolution Compact Design; 27 mm Profile Height, 150x150 mm Footprint Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position Self-Locking at Rest Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-311 – M-318 Miniature Linear Slide Extremely Compact All-Stainless-Steel Construction X, XY and XYZ Versions Optional PiezoMike for Nanometer Resolution 4 mm Clear Aperture Linear Ball Bearings
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		M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings Travel to 15 mm Compact Side Drive Straightness/Flatness ≤ 0.2 Micro Meters PZT Drive for Scanning and Tracking Applications 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor 5 Nanometer Position Resolution with Closed-Loop PZT Drive
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		M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings Travel 25 mm Compact Side Drive Straightness/Flatness ≤0.3 Micro Meters PZT Drive for Scanning and Tracking Applications 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor 5 Nanometer Position Resolution with Closed-Loop PZT Drive 30 mm Ø Clear Aperture
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-126 Translation Stage with Crossed Roller Bearings To 25 mm Travel Manual, DC-Servo and Stepper-Motor Drives ActiveDrive™ Option Compatible with Leading Industrial Motion Controllers Crossed Roller Bearings <0.1 Micro Meters Position Resolution XY and XYZ Combinations Direction-Sensing Origin Switch Non-Contact Limit Switches
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-403, M-404, M-413, M-414 High-Resolution Linear Slide with Stepper and DC Motor Drives Cost-Effective Design Modular System with 4 Series: M-403, M-404, M-413, M-414 Preloaded Leadscrews or Recirculating Ball Screws Travel s from 25 to 300 mm Stress-Relieved Aluminum Base 80 and 120 mm Width Minimum Incremental Motion to 0.1 Micro Meters Position Resolution to 0.017 Micro Meters
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		M-400 Series High-Precision Linear Slides with Crossed Roller Bearings Travel Ranges to 150 mm Stress-Relieved Aluminum Stage Base for Highest Stability Crossed Roller Bearings Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option Compatible with Leading Industrial Motion Controllers Manual Knob for Convenient Position Adjustment Non-Contact Direction-Sensing Origin Switch Non-Contact Limit Switches
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-605 Ultra-Compact, High-Accuracy Linear Slide Integrated Linear-Scale Encoders for Highest Accuracy Travel Ranges 25 mm (1") and 50 mm (2") Velocity up to 50 mm/sec. Active Drive™ Motors Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact, Direction-Sensing Origin Switch Non-Contact Limit Switches Load Capacity 20 kg >20,000 Hours MTBF
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-505 Low-Profile Linear Slides with Ballscrew Drives Travel Ranges to 150 mm (6 inches) Velocity up to 50 mm/sec. ActiveDrive™ Motors Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact Direction-Sensing Origin Switch Non-Contact Limit Switches Load Capacity 100 kg > 20,000 Hours MTBF
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		M-511 · M-521 · M-531 Low-Profile, High-Load Linear Slides with Ballscrew Drives Travel Ranges to 306 mm (12") Velocity up to 125 mm/sec. ActiveDrive™ Motors Compatible with Leading Industrial Motion Controllers Linear-Scale Encoders for Highest Accuracy Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contacting Origin and Limit Switches PIIntelliStage™ Version with Integrated Controller Load Capacity 100 kg >20000 Hours MTBF
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-511.HD Long-Travel, High-Speed Nanopositioning Systems Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives 4 Nanometer Linear Encoder Position Resolution 100 mm Travel Velocities to 125 mm/sec Active Compensation of Stick/Slip During Startup and Settling Active Backlash Compensation Excellent Velocity Control Millisecond Settling to Nanometer Accuracy Reliable Execution of Minimal Increments High Drive and Holding Forces with Minimal Power
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Voice Coil Scanning Stage


		V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives Fast Scanning and Positioning Scanning Frequency 10s of Hz Travel Ranges of 20 mm and 6 mm Velocity up to 270 mm/s 0.1 Micro Meters Linear Encoder Available PCI-Card Controller with On-Board Amplifiers
Product Description \| Specs / Drawings \| Ordering Info \| PDF


Vertical Translation Stages

		P-620.Z · P-621.Z · P-622.Z PIHera^® Piezo-Z Nanopositioning Slides with Direct Motion Metrology Z-Axis Travel to 400 Micro Meters Low Profile Position Resolution <1 Nanometer Frictionless Precision Flexure Guiding System Ceramic Encapsulated High-Performance Multilayer Piezo Drives Direct Motion Metrology with Capaciance Feedback for Improved Linearity 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-501 Vertical Micropositioning Stage Travel 12.5 mm (1/2") Ultra-High-Resolution Encoder ActiveDrive™ Motor Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact Origin and Limit Switches >20,000 Hours MTBF
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		M-451 High-Load Vertical Micropositioning Stage 3 Nanometer Design Resolution 12 kg Load Capacity, High Stiffness <100 Nanometer Minimum Incremental Motion 12.5 mm (1/2") Travel ActiveDrive™ Motor Compatible with Leading Industrial Motion Controllers Non-Contact Origin and Limit Switches Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems Self Locking
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives 2 Nanometer Linear Encoder Position Resolution High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load Active Compensation of Stick/Slip During Startup and Settling Active Backlash Compensation Excellent Velocity Control Millisecond Settling to Nanometer Accuracy Reliable Execution of Minimal Increments
Product Description \| Specs / Drawings \| Ordering Info \| PDF


Single Axis Piezo Nanopositioning Slides

		P-780 Miniature Piezo Nanopositioning/Scanning Slide with Direct Metrology Fast Response (1 kHz Resonant Frequency) Stainless Steel Construction Frictionless Precision Flexure Guiding System 80 Micro Meters Travel Direct Motion Metrology with LVDT Sensor Position Resolution <5 Nanometer Ceramic Encapsulated High-Performance Multilayer Piezo Drives
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		P-750 High-Load Piezo-Driven Nanopositioning Slides with Direct Metrology 10 kg Load Capacity 1 Nanometer Lateral Guiding Precision Position Resolution <1 Nanometer Ceramic Encapsulated High-Performance Multilayer Piezo Drives Fast Response 75 Micro Meters Travel Direct Motion Metrology with Capaciance Feedback for Improved Linearity Frictionless Precision Flexure Guiding System



		P-620.1 – P-628.1 PIHera^® Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology Travel to 1800 Micro Meters Compact Design Position Resolution <1 Nanometer Frictionless Precision Flexure Guiding System Ceramic Encapsulated High-Performance Piezo Drives Direct Motion Metrology with Capaciance Feedback for Improved Linearity Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions



		P-772OL Ultra-Compact Open-Loop PZT Nanopositioning Stage Small Flexure-Guided Linear Slide 50 Picometer Resolution 10 Micro Meters Travel Ultra-Fast Response (1.7 kHz Resonant Frequency) Closed-Loop Version Available
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		P-772 Ultra-Compact Piezo NanoAutomation^® Slide with Direct Motion Metrology Smallest Flexure-Guided Linear Slide with Capacitive Feedback Ideal for Head/Media Test & Fiber Optics Position Resolution <0.1 nm Ultra-Fast Response (1.7 kHz Resonant Frequency) ID-Chip for Auto Calibrate Function Frictionless Precision Flexure Guiding System Ceramic Encapsulated High-Performance Multilayer Piezo Drives




		P-752 Piezo NanoAutomation^® Slides with Direct Motion Metrology Extreme Responsivness Ultra-Precise Trajectory Control Digital Controllers with Fast FiberLink Interface Available ID-Chip for AutoCalibrate Function Direct-Metrology Capaciance Feedback for Improved Linearity 0.1 Nanometers Resolution Ceramic Encapsulated High-Performance Multilayer Piezo Drives




		P-753 LISA Piezo NanoAutomation® Slides / Actuators with Direct Motion Metrology Slide and Linear Actuator in one Package Frictionless Precision Flexure Guiding System 0.05 Nanometers Position Resolution Direct Motion Metrology with Capaciance Feedback for Improved Linearity Extreme Responsivness, Very Compact Ceramic Encapsulated High-Performance Multilayer Piezo Drives ID-Chip for Auto Calibrate Function Vacuum Versions Available
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Z-Stage & Actuators

		P-287 Z/Tilt Piezoelectric Flexure Stage Frictionless Precision Flexure Guiding System Vertical Travel to 700 Micro Meters Tilt to 0.7 degrees Non-Magnetic Stainless Steel Design



		P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator Vertical Travel to 1000 Micro Meters Integrated Double-Flexure Motion Amplifier Non-Magnetic Stainless Steel Design
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		P-601 PiezoMove^® High-Precision Lever Amplified Z-Actuator with Flexure Guiding Flexure Guidance for Frictionless, Ultra-Straight Motion Travel Ranges to 480 Micro Meters Position Resolution to 0.2 Nanometer High Dynamics and Stiffness Ceramic Encapsulated High-Performance Piezo Actuators Open and Closed-Loop Versions Ideal for OEM Applications
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		P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology Z-Axis Travel to 300 Micro Meters Low Profile Frictionless Precision Flexure Guiding System Internal Motion Amplifier Closed-Loop Position Resolution <10 Nanometer PICMA^®High-Performance Multilayer Piezo Drives



		P-620.Z · P-621.Z · P-622.Z PIHera^® Piezo-Z Nanopositioning Slides with Direct Motion Metrology Z-Axis Travel to 400 Micro Meters Low Profile Position Resolution <1 Nanometer Frictionless Precision Flexure Guiding System Ceramic Encapsulated High-Performance Multilayer Piezo Drives Direct Motion Metrology with Capaciance Feedback for Improved Linearity 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions





		M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives 2 Nanometer Linear Encoder Resolution High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load Active Compensation of Stick/Slip During Startup and Settling Active Backlash Compensation Excellent Velocity Control Millisecond Settling to Nanometer Accuracy Reliable Execution of Minimal Increments
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Z-/Tip/Tilt Slides (with Aperture)

		P-732 High-Dynamics Vertical Nanopositioning/Scanning Stage High Stiffness for High-Dynamics Operation Up to 15 Micro Meters Vertical Travel <1 Nanometer Resolution Straightness of travel <10 microradian Clear Aperture with 25 mm Diameter



		P-612 Compact Piezo Elevation Stage with Aperture Small Footprint: 60x60 mm For Cost-Sensitive Applications 100 Micro Meters Travel Position Resolution to 0.2 Nanometer Clear Aperture : 20x20 mm PICMA® High-Performance Multilayer Piezo Actuators
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		P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy Lower Profile for Easy Integration: 16.5 mm Z and Tip/Tilt Versions Fast Response 100 Micro Meters Linear Travel 80x80 mm Clear Aperture Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime Combination with Long Travel Microscopy Stages
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		P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology Lower Profile for Easy Integration: 16.5 mm Z and Tip/Tilt Versions Choice of Strain Gauge (Lower Cost) or Capaciance Feedback (Higher Performance) 100 Micro Meters Linear Travel , 1 milliradian Tilt 80x80 mm Clear Aperture Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging



		P-528 Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micro Meters / 4 milliradian Clear Aperture 66x66 mm Direct Motion Metrology with Capaciance Feedback for Improved Linearity Ceramic Encapsulated High-Performance Multilayer Piezo Drives


PIFOC^® Objective Scanners
		P-720 PIFOC^® High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives Scans and Positions Objectives with Sub-Nanometer Resolution Low Inertia for Fast Settling Frictionless Precision Flexure Guiding System Travel to 100 Micro Meters Straightness of Travel ≤13 microradian Ceramic Encapsulated High-Performance Multilayer Piezo Drives
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		P-721 PIFOC^® High-Speed Nanofocusing/Scanning Z-Drives with Direct Motion Metrology Scans and Positions Objectives with Sub-Nanometer Resolution High Linearity and Stability with Direct-Measuring Sensors Travel to 100 Micro Meters, fast Settling Time Very Straight Motion for Enhanced Focus Stability Ask about DIC Prism Holder Option Compatible with Metamorph^TM Imaging Software Quick Lock Adapter for Easy Attachment



		P-725 PIFOC^® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology Scans and Positions Objectives with Sub-Nanometer Resolution High Linearity and Stability with Direct-Measuring Capaciance Feedback Travel to 460 Micro Meters, Fast Response & Settling Time Frictionless Precision Flexure Guiding System Enhanced Guiding Precision for Better Focus Stability Ask about DIC Prism Holder Option Controller Compatible with Metamorph^TM Imaging Software Quick Lock Adapter for Easy Attachment


Multi-Axis Slides without Aperture

		P-280 Modular Piezo Flexure Guided Nanopositioning Stages Frictionless Precision Flexure Guiding System Very Compact Low Cost Travel to 100 Micro Meters XY and XYZ Combinations
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		P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems Small Footprint: 44x44 mm 100 Micro Meters Travel Position Resolution to 0.2 Nanometer For Cost-Sensitive Applications Ceramic Encapsulated High-Performance Multilayer Piezo Actuators Open- and Closed-Loop Models



		P-611.1 · P-611.2 Compact X & XY Piezoelectric Nanopositioning Systems Small Footprint: 44x44 mm 100 Micro Meters Travel Position Resolution to 0.2 Nanometer For Cost-Sensitive Applications Ceramic Encapsulated High-Performance Multilayer Piezo Actuators Z-Stage also Available



		P-281 Modular XY & XYZ Piezo Flexure Guided Nanopositioning Stages Cost-Effective XZ (XY) & XYZ Positioning Travel Ranges to 100x100x100 Micro Meters
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		P-620.2 – P-628.2 PIHera^® Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology XY-Travel to 1800 Micro Meters Compact Design Position Resolution <1 Nanometer Frictionless Precision Flexure Guiding System Ceramic Encapsulated High-Performance Multilayer Piezo Drives Direct Motion Metrology with Capaciance Feedback for Improved Linearity Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions



		P-363 PicoCube^® High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM & Ultra-High-Performance Closed-Loop Piezo Stage for AFM/SPM NanoManipulation Tool Ultra-High-Precision Capacitive Feedback 50 Picometers Resolution 5x5x5 Micro Meters Travel Very Small Package Rugged Design



		P-611.3S · P-611.3O NanoCube^® Piezo System XYZ Linear Slide Travel : 100x100x100 Micro Meters Compact Size: 44x44x44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card Features Built-In Optical Metrology Closed- and Open-Loop Versions Flexure-Guided Precision Trajectory Control Fast Scanning and Settling Large Variety of Controllers
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		P-587 Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology For Scanning and Positioning in all Six Degrees of Freedom 800x800x200 Micro Meters Linear Range Up to 10 mad Rotational Range Precision Trajectory Control Parallel-Kinematic / Metrology for Enhanced Responsiveness / Multi-Axis Precision Direct Motion Metrology with Capaciance Feedback for Improved Linearity ID-Chip for Auto Calibration Function Ceramic Encapsulated High-Performance Multilayer Piezo Drives